M05200 - SEMI M52 - Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations Revision:SEMI M52-0706 - Superseded The Guide covers the selection

The Guide covers the selection of materials for resistivity reference wafers

SEMI E174-0618 (technical revision)

This Guide sets forth a logical and systematic approach to the qualification of bulk chemical distribution systems (BCDS) that may be used by end users and suppliers as a basis for developing site-specific BCDS specifications

本スタンダードは，global Assembly & Packaging Technical Committeeで技術的に承認されている。現版は2011年7月1日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年8月にwww

SEMI M55-0308 (technical revision)

M05200 - SEMI M52 - Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations Revision:SEMI M52-0706 - Superseded The Guide covers the selection* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1